NIST2133

Phosphorus implant in silicon depth profile standard

NIST^® SRM^® 2133

• UNSPSC 코드: 41116107
• NACRES: NA.24

속성

• Grade: certified reference material
• Quality Level: 100
• 포장: pkg of each
• 제조업체/상표: NIST^®
• 응용 분야: semiconductor
• 형식: matrix material

설명

일반 설명

The SRM contains a single crystal silicon substrate measuring 1 cm × 1 cm, which is ion-implanted with the isotope 31P at a nominal energy of 100 keV.

SRM 2133_cert

SRM 2133_SDS

애플리케이션

The SRM is intended to calibrate the secondary ion response for minor and trace concentrations of phosphorus within a silicon matrix using the secondary ion mass spectrometry (SIMS) method.

특징 및 장점

• Available with certificate documenting NIST-certified retained dose of 31P atoms which is obtained through radiochemical neutron activation analysis (RNAA).
• The NIST certificate is provided with expiration certificate, storage, handling, use, and maintenance instructions.

기타 정보

Example analytes are listed below as a reference. Please download a current certificate at nist.gov/SRM for current analytes and certified values.
Phosphorus (³¹P)

법적 정보

NIST is a registered trademark of National Institute of Standards and Technology

SRM is a registered trademark of National Institute of Standards and Technology

안전성 정보

• Storage Class Code: 13 - Non Combustible Solids
• WGK: WGK 3
• Flash Point (°F): Not applicable
• Flash Point (°C): Not applicable