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About This Item
Linear Formula:
(SiCl3)2
CAS Number:
Molecular Weight:
268.89
EC Number:
MDL number:
UNSPSC Code:
12352103
PubChem Substance ID:
NACRES:
NA.23
assay
96%
form
liquid
refractive index
n20/D 1.475 (lit.)
bp
144-145.5 °C (lit.)
density
1.562 g/mL at 25 °C (lit.)
SMILES string
Cl[Si](Cl)(Cl)[Si](Cl)(Cl)Cl
InChI
1S/Cl6Si2/c1-7(2,3)8(4,5)6
InChI key
LXEXBJXDGVGRAR-UHFFFAOYSA-N
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General description
Hexachlorodisilane (HCDS) is a chlorosilane used as a precursor for producing disilanes. It is a dioxidizer that is used in the production of silicon films and silicon nitride based films.
Application
HCDS can be used in the fabrication of silica aerogels by chemical vapor deposition (CVD), which can be potentially used as encapsulating agents and thermal insulators. It can also be used to synthesize 1,1,1,2,2,2-hexaamino-disilanes using CVD, which forms silicon-based films for microelectronic-based applications.
HCDS may be used as a reducing agent. It may be combined with ammonia to form silicon nitride by chemical vapor deposition(CVD) technique.
signalword
Danger
hcodes
Hazard Classifications
Skin Corr. 1B
supp_hazards
Storage Class
8A - Combustible corrosive hazardous materials
wgk_germany
WGK 3
flash_point_f
Not applicable
flash_point_c
Not applicable
ppe
Faceshields, Gloves, Goggles, type ABEK (EN14387) respirator filter
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